Application of the Helium Ion Microscope as a Sculpting Tool for Nanosamples

Conference Paper (2012)
Author(s)

M. Rudneva (QN/High Resolution Electron Microscopy)

EWJM van Veldhoven (External organisation)

S.R.K. Malladi (QN/High Resolution Electron Microscopy)

D.J. Maas (External organisation)

H.W. Zandbergen (QN/High Resolution Electron Microscopy)

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Publication Year
2012
Language
English
Pages (from-to)
1-12

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