A novel semi SOI fabrication process for integrated 3D micromachining
Conference Paper
(2008)
Author(s)
J. Wei (TU Delft - Electronic Components, Technology and Materials)
T Chu Duc (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:4fe9a6a2-6712-4297-aa91-d592dd7a2022
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Publication Year
2008
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
717-720
ISBN (print)
978-1-4244-1908
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