Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties
Journal Article
(2014)
Author(s)
Enrico Serra (TU Delft - Electronic Components, Technology and Materials)
M Bonaldi (External organisation)
A. Borrielli (External organisation)
L Conti (External organisation)
Grégory Pandraud (TU Delft - Electronic Components, Technology and Materials)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.proeng.2014.11.579
To reference this document use:
https://resolver.tudelft.nl/uuid:51a29a61-80c7-443f-b46c-fead40385ccd
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Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
87
Pages (from-to)
1485-1488
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