Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

Serra, E.; Bonaldi, M.; Borrielli, Antonio; Conti, L; Pandraud, Gregory; Sarro, PM

Selective coating deposition on high-Q single-crystal silicon resonators for the investigation of thermal noise statistical properties

Journal article (2014)

Authors

E. Serra Electronic Components, Technology and Materials

M. Bonaldi External organisation

Antonio Borrielli External organisation

L Conti External organisation

Gregory Pandraud Electronic Components, Technology and Materials

PM Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

To reference this document use:

http://resolver.tudelft.nl/uuid:51a29a61-80c7-443f-b46c-fead40385ccd

More Info

expand_more

Published Date

2014

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Components, Technology and Materials

No files available

Metadata only record. There are no files for this journal article.