Process Control of Aluminum-Doped Silicon Deposited by Low-Temperature Material-Inversion Solid-Phase Epitaxy
Conference Paper
(2006)
Author(s)
Y Civale (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
P Hadley (TU Delft - QN/Mol. Electronics & Devices)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:529854bd-60bc-4904-aec5-f6e088482d53
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
458-461
ISBN (print)
90-73461-44-8
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