Novel post-etching treatment of small windows in oxide for selective epitaxial growth

JWH Maes (TU Delft - Old organisation TN/TechnischeNatuurkunde voorm)

J. Caro-Schuurman (TU Delft - QN/Fysics of NanoElectronics)

CCG Visser (External organisation)

T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)

E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)

S Radelaar (TU Delft - OLD Metals Processing, Microstructures and Properties)

F.D. Tichelaar (TU Delft - OLD Virtual Materials and Mechanics)

EJM Fakkeldij (External organisation)