Integrated Photonic Ultrasound Transducers for Medical Imaging
Peter J. Harmsma (TNO)
Maurits S. van der Heiden (TNO)
Robert K. Altmann (TNO)
Anne Maaike Gerritsma (TNO)
Sabiju Valiya Valappil (TU Delft - Applied Sciences)
Benoit A.J. Quesson (TNO)
Yisbel E. Marin (VTT Technical Research Center of Finland)
Mikko Harjanne (VTT Technical Research Center of Finland)
Srivathsa Bhat (VTT Technical Research Center of Finland)
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Abstract
We present our experimental results on ultrasound transducers based on Photonic Integrated Circuits. We have fabricated and tested devices based on Mach Zehnder Interferometers and Ring Resonators, in the thick-Silicon on Insulator platform (VTT, Finland) and Si3N4 platform (Ligentec, Switzerland). We have obtained a Noise Equivalent Pressure which is two orders of magnitude lower than conventional State-Of-The-Art transducers, clearly demonstrating the huge potential of this concept.