Low-temperature wafer-to-wafer bonding for microchemical systems
Doctoral Thesis
(2001)
Author(s)
A Berthold (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:55ea6397-02e5-439b-98e2-10990eb8eaac
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
ISBN (print)
90-75095-78-3
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