The effect of electric-field bending on the linearity of capacitive position sensors with various elecrode structures

Conference paper (1999)

Authors

X. Li Electronic Instrumentation - EEMCS
G de Jong Old - ITG Section Processing of Primary Raw Materials
G.C.M. Meijer Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

1999

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation