Molecular dynamics simulation of silicon sputtering: sensitivity to the choice of potential

Thijsse, B.J.; Klaver, T.P.C.; Haddeman, EFC

Molecular dynamics simulation of silicon sputtering: sensitivity to the choice of potential

Journal article (2004)

Authors

B.J. Thijsse OLD Virtual Materials and Mechanics

T.P.C. Klaver OLD Virtual Materials and Mechanics

EFC Haddeman OLD Virtual Materials and Mechanics

Research Group

OLD Virtual Materials and Mechanics

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Published Date

2004

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Research Group

OLD Virtual Materials and Mechanics