InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching
Conference Paper
(2000)
Author(s)
JJGM van der Tol (External organisation)
M Silova (External organisation)
F Karouta (External organisation)
RG Broeke (TU Delft - Old - EWI Ch. Photonic Integrated Circuits)
HH Tan (External organisation)
C Jagadish (External organisation)
E Smalbrugge (External organisation)
BH van Roy (External organisation)
Research Group
Old - EWI Ch. Photonic Integrated Circuits
To reference this document use:
https://resolver.tudelft.nl/uuid:5b427561-81c0-473a-8a2f-18819dee0196
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Publication Year
2000
Research Group
Old - EWI Ch. Photonic Integrated Circuits
Pages (from-to)
127-130
ISBN (print)
90-901426-6
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