InP-based waveguides: comparison of ECR plasma etching and wet-chemical etching

Conference paper (2000)

Authors

JJGM van der Tol External organisation
M Silova External organisation
F Karouta External organisation
RG Broeke Old - EWI Ch. Photonic Integrated Circuits
HH Tan External organisation
C Jagadish External organisation
E Smalbrugge External organisation
BH van Roy External organisation
Research Group
Old - EWI Ch. Photonic Integrated Circuits
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Published Date

2000

Language

Undefined/Unknown

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Research Group

Old - EWI Ch. Photonic Integrated Circuits