Silicon-based MEMS micro-evaporator
Conference Paper
(2009)
Author(s)
J Hao (External organisation)
M. Mihailovic (TU Delft - Electronic Components, Technology and Materials)
CM Rops (TU Delft - Fluid Mechanics)
JF Creemer (TU Delft - Electronic Components, Technology and Materials)
Pasqualina Maria Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:5b4b9d28-b598-4820-8a83-9ae0a7a4ee35
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Publication Year
2009
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
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