Stiction-driven sealing of surface micromachined channels
Conference Paper
(2012)
Author(s)
B. Morana (TU Delft - Electronic Components, Technology and Materials)
Grégory Pandraud (TU Delft - Electronic Components, Technology and Materials)
F. Santagata (TU Delft - Electronic Components, Technology and Materials)
J.F. Creemer (TU Delft - Electronic Components, Technology and Materials)
Lina P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/MEMSYS.2012.6170202
To reference this document use:
https://resolver.tudelft.nl/uuid:5cf13872-298f-4358-a20f-b309f0a32a62
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
329-332
ISBN (print)
978-146730324-8
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