Resolution limit for Electron-Beam-Induced-Deposition on thick substrates
Journal Article
(2005)
Author(s)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:5d0d5fb9-b5da-4f7f-9c2c-e271e2bc88c1
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
2
Volume number
27
Pages (from-to)
90-91
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