Transient Chemical Vapor Deposition Simulations

Journal Article (2007)
Author(s)

S van Veldhuizen (TU Delft - Numerical Analysis)

Kees Vuik (TU Delft - Numerical Analysis)

CR Kleijn (TU Delft - MSP/Thermal & Materials Processes)

Research Group
Numerical Analysis
More Info
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Publication Year
2007
Research Group
Numerical Analysis
Issue number
08
Volume number
07
Pages (from-to)
1-22

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