An analytical kinetic model for chemical-vapor deposition of pureB layers from diborane
Journal Article
(2012)
Author(s)
Vahid Mohammadi (TU Delft - Electronic Components, Technology and Materials)
Wiebe de Boer (TU Delft - Old - EWI Sect. ECTM)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1063/1.4767328
To reference this document use:
https://resolver.tudelft.nl/uuid:5f7a777a-93c5-47b7-8bb8-1e0dd3c957e1
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Publication Year
2012
Language
English
Research Group
Electronic Components, Technology and Materials
Issue number
11
Volume number
112
Pages (from-to)
1-10
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