Polymer constraint effect for electrothermal bimorph microactuators

Journal article (2007)

Authors

T Chu Duc Electronic Components, Technology and Materials - EEMCS
GK Lau Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

The authors report on the analysis of the polymer constraint effect and its use for a micromachined electrothermal bimorph actuator. The actuated displacement is enhanced due to the polymer constraint effect. Both the thermal expansion and apparent Young's modulus of the constrained polymer blocks are significantly improved, compared with the no constraint case. The calculation that agrees well with experimental results provides the means to optimize the design of the constrained polymer stack electrothermal microactuator.