A single-mask thermal displacement sensor in MEMS
Conference Paper
(2010)
Author(s)
RP Hogervorst (External organisation)
B Krijnen (External organisation)
DM Brouwer (External organisation)
JBC Engelen (External organisation)
Urs Staufer (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:5fcd9847-d4f6-44a3-8c46-0fb0593c76f7
More Info
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Publication Year
2010
Language
English
Research Group
Micro and Nano Engineering
Pages (from-to)
47-50
ISBN (print)
978-0-9553082-8-4
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