A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another 'identical' one does not
Journal Article
(2015)
Authors
W. Merlijn van Spengen (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
To reference this document use:
https://doi.org/10.1088/0960-1317/25/12/125012
TU Delft Repository resolver:
https://resolver.tudelft.nl/603d7dcd-d0c5-498f-b847-46f56a9cf368
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Publication Year
2015
Language
English
Research Group
Micro and Nano Engineering
Issue number
12
Volume number
25
DOI:
https://doi.org/10.1088/0960-1317/25/12/125012
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