A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another 'identical' one does not
Journal Article
(2015)
Author(s)
WM van Spengen (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1088/0960-1317/25/12/125012
To reference this document use:
https://resolver.tudelft.nl/uuid:603d7dcd-d0c5-498f-b847-46f56a9cf368
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Publication Year
2015
Language
English
Research Group
Micro and Nano Engineering
Issue number
12
Volume number
25
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