Optical absorptivity of LPCVD SiN membrane in 8-14 micrometer wavelength region for far infrared sensor application
Conference Paper
(2008)
Author(s)
DHB Wicaksono (TU Delft - Electronic Instrumentation)
F jutzi (External organisation)
G Pandraud (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
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https://resolver.tudelft.nl/uuid:6062bb01-4c99-42e8-b177-ce3b93ea5a8d
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
163-167
ISBN (print)
0855-8692
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