Surface damage of mechanically polished polycrystalline Si wafers

Tichelaar, F.D.; de Kruijff, T.R.

Surface damage of mechanically polished polycrystalline Si wafers

Report (2003)

Authors

F.D. Tichelaar QN/High Resolution Electron Microscopy

T.R. de Kruijff QN/High Resolution Electron Microscopy

Research Group

QN/High Resolution Electron Microscopy

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Published Date

2003

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Research Group

QN/High Resolution Electron Microscopy