TEM investigation of excimer-laser recrystallised Si layers with a crystalline seed in the underlaying Si-oxide, 0%, 50%, 70% and 90% laser transmissions

Report (2002)
Author(s)

F. Tichelaar (TU Delft - OLD Virtual Materials and Mechanics)

T.R. de Kruijff (TU Delft - OLD Virtual Materials and Mechanics)

Research Group
OLD Virtual Materials and Mechanics
More Info
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Publication Year
2002
Research Group
OLD Virtual Materials and Mechanics

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