TEM investigation of excimer-laser recrystallised Si layers with a crystalline seed in the underlaying Si-oxide, 0%, 50%, 70% and 90% laser transmissions

Report (2002)

Authors

F.D. Tichelaar OLD Virtual Materials and Mechanics
T.R. de Kruijff OLD Virtual Materials and Mechanics
Research Group
OLD Virtual Materials and Mechanics
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Published Date

2002

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Research Group

OLD Virtual Materials and Mechanics