Silicon-polymer laterally stacked bimorph micro-gripper
Conference Paper
(2006)
Author(s)
T Chu Duc (TU Delft - Electronic Components, Technology and Materials)
GK Lau (TU Delft - Computational Design and Mechanics)
J. Wei (TU Delft - Electronic Components, Technology and Materials)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:64180db5-72bc-4ea5-aae7-656ca630b5d1
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
197-200
ISBN (print)
085432-648-3
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