Monocrystalline Si-based microhotplate heater
Conference Paper
(2007)
Author(s)
M Mihailovic (TU Delft - Electronic Components, Technology and Materials)
Fredrik Creemer (TU Delft - Old - EWI Sect. ECTM)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:6577341e-b445-443e-b957-7817da6a72c6
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Publication Year
2007
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
498-501
ISBN (print)
978-90-73461-49-9
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