the development of micromachined humidity sensors based on a dielectric of porous silicon - meeting 6
Report
(2003)
Authors
E Connolly (TU Delft - Electronic Instrumentation)
P. J. French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/66fb8736-3346-4293-9aaa-027858618344
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Publication Year
2003
Research Group
Electronic Instrumentation
Volume number
STW project DEL 4694
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