Optical metrology techniques for dimensional stability measurements

Ellis, Jonathan David

Optical metrology techniques for dimensional stability measurements

Doctoral thesis (2010)

Authors

Jonathan David Ellis

Contributors

R.H. Munnig Schmidt (promotor)

J.W. Spronck (promotor)

Department

Precision and Microsystems Engineering

Interferometry Laser stabilization Optical metrology Material stability

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Published Date

03-12-2010

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Abstract

This thesis work is optical metrology techniques to determine material stability. In addition to displacement interferometry, topics such as periodic nonlinearity, Fabry-Perot interferometry, refractometry, and laser stabilization are covered.

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