Optical metrology techniques for dimensional stability measurements
Doctoral Thesis
(2010)
Author(s)
Copyright
© 2010 Ellis, J.D.
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Publication Year
2010
Copyright
© 2010 Ellis, J.D.
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Abstract
This thesis work is optical metrology techniques to determine material stability. In addition to displacement interferometry, topics such as periodic nonlinearity, Fabry-Perot interferometry, refractometry, and laser stabilization are covered.