Hybrid wafer-level packaging scheme for RF-MEMS

Abstract (2006)
Author(s)

S Sosin (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

J Tian (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

M Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)

Research Group
Old - EWI Ch. Integrated Sensing Devices
More Info
expand_more
Publication Year
2006
Research Group
Old - EWI Ch. Integrated Sensing Devices
Pages (from-to)
139-139

No files available

Metadata only record. There are no files for this record.