Design and fabrication of two types of tapered waveguides for evanescent sensing

Conference Paper (2017)
Author(s)

Y. Xin (TU Delft - Electronic Instrumentation, National University of Defense Technology)

Y. Zhang (National University of Defense Technology)

G. Pandraud (TU Delft - EKL Processing)

P. J. French (TU Delft - Electronic Instrumentation)

Research Group
Electronic Instrumentation
More Info
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Publication Year
2017
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
282-288
ISBN (electronic)
978-3-95735-057-2

Abstract

For optical waveguide sensing, the challenging problems lie in the coupling efficiency and alignment tolerance [1]. This paper presents two different types of waveguides with tapers for evanescent sensing to relieve these problems. The first waveguide is SiC waveguide with 3D tapered coupler and the other is SU8 standing waveguide with horizontal tapered coupler. The design, simulation and fabrication of both structures will be illustrated.

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