Design and fabrication of two types of tapered waveguides for evanescent sensing

Xin, Y.; Zhang, Y.; Pandraud, Gregory; French, P.J.

Design and fabrication of two types of tapered waveguides for evanescent sensing

Conference paper (2017)

Authors

Y. Xin Electronic Instrumentation, National University of Defense Technology

Y. Zhang National University of Defense Technology

Gregory Pandraud EKL Processing

P.J. French Electronic Instrumentation

Research Group

Electronic Instrumentation

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Published Date

2017

Language

English

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Research Group

Electronic Instrumentation

Abstract

For optical waveguide sensing, the challenging problems lie in the coupling efficiency and alignment tolerance [1]. This paper presents two different types of waveguides with tapers for evanescent sensing to relieve these problems. The first waveguide is SiC waveguide with 3D tapered coupler and the other is SU8 standing waveguide with horizontal tapered coupler. The design, simulation and fabrication of both structures will be illustrated.

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