Design of a dual-tone controller for Lissajous-based scanning of fast steering mirrors

Conference paper (2016)

Authors

Ernst Csencsics Christian Doppler Laboratory for Precision Engineering for Automated In-Line Metrology, Technische Universität Wien
R. Saathof Technische Universität Wien, Automation and Control Institute
Georg Schitter Technische Universität Wien
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Published Date

2016

Language

English

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Abstract

Fast steering mirrors (FMSs) are used in various applications like optical scanning of surfaces, feature detection or beam steering for optical communication systems. This paper introduces Lissajous scan trajectories to improve the tracking performance of a commercial FSM scanning system. The design of a dual tone (DT) feedback controller is presented that is tailored to this type of trajectory and the low-stiffness properties of electromagnetically actuated systems. It is shown that the controller can be used to eliminate periodic errors resulting from remaining cross-talk between the system axes. The DT controller significantly improves the tracking performance as compared to conventional wide bandwidth (WBW) control of the FSM. Applying the tailored controller with Lissajous trajectories reduces the RMS tracking error to 0.77%, as compared to more than 9.1% for the conventional raster scan with a WBW controller. The peak error is reduced from 16% for the raster scan to 1.1% for the Lissajous scan.