Amorphous silicon carbide nitride layer as an alternative to a disordered silicon surface to suppress RF/microwave losses
Journal Article
(2014)
Author(s)
S.B. Evseev (TU Delft - Electronic Components, Technology and Materials)
Lis Nanver (TU Delft - Electronic Components, Technology and Materials)
B Rejaei Salmassi (External organisation)
S. Milosavljević (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1016/j.mee.2014.04.003
To reference this document use:
https://resolver.tudelft.nl/uuid:6ae78cb4-d032-44a8-83e6-46a076b320a6
More Info
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Publication Year
2014
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
125
Pages (from-to)
2-7
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