Solid phase crystallisation of hydrogenated amorphous silicon deposited by ETPCVD on glass

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Abstract

Generation of electricity using renewable energy sources is becoming an integral part of the electrical energy mix. A substantial fraction of the electrical energy is foreseen to be generated by photovoltaic (PV) solar cells that directly convert light into electricity. Large scale application of building integrated PV is envisaged to aid the integration of renewable energy in our society, both from a practical and an aesthetic point of view. For implementation of large-scale PV preferably abundant and non-toxic materials are required as well as production processes for making the solar cells in large quantities [1]. For this purpose silicon is the most preferred element, because of its properties for application in solar cells and because of its abundance, despite the fact that refining and doping of Si are dependant on toxic materials [2].