Atomic radical abatement of organic impurities form electron beam deposited metallic structures
Journal Article
(2010)
Author(s)
J.D. Wnuk (External organisation)
J.M. Gorham (External organisation)
S.G. Rosenberg (External organisation)
T.E. Madey (External organisation)
CW Hagen (TU Delft - ImPhys/Charged Particle Optics)
D.H. Fairbrother (External organisation)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:6b405a60-741d-48a8-a2f2-9ca51a4359fc
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Publication Year
2010
Language
English
Research Group
ImPhys/Charged Particle Optics
Issue number
(3)
Volume number
28
Pages (from-to)
527-537
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