Atomic radical abatement of organic impurities form electron beam deposited metallic structures

Journal article (2010)

Authors

J.D. Wnuk External organisation
J.M. Gorham External organisation
S.G. Rosenberg External organisation
T.E. Madey External organisation
C.W. Hagen ImPhys/Charged Particle Optics
D.H. Fairbrother External organisation
Research Group
ImPhys/Charged Particle Optics
More Info
expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

ImPhys/Charged Particle Optics