Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.

Conference paper (1999)
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
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Published Date

1999

Language

Undefined/Unknown

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft