Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.
Conference Paper
(1999)
Author(s)
T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
MJA de Dood (External organisation)
E Snoeks (External organisation)
A Polman (External organisation)
Research Group
QN/Kavli Nanolab Delft
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Publication Year
1999
Research Group
QN/Kavli Nanolab Delft
Pages (from-to)
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