A fully coupled fem model of electromechanically acutated mems with squeeze film damping
Conference Paper
(2009)
Author(s)
SDA Hannot (TU Delft - Dynamics of Micro and Nano Systems)
D.J. Rixen (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:6d56f525-6d4e-45cf-8aff-45423466693b
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Publication Year
2009
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
1-8
ISBN (print)
978-0-7918-3856-3
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