A fully coupled fem model of electromechanically acutated mems with squeeze film damping

Conference paper (2009)

Authors

SDA Hannot Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
D.J. Rixen Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2009

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems