Electrostatic rotator for alignment purposes in multi electron beam systems

Journal article (2010)

Authors

A.C. Zonnevylle ImPhys/Charged Particle Optics
C.T.H. Heerkens ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
ML Wieland External organisation
F.M. Postma ImPhys/Charged Particle Optics
SWHK Steenbrink QN/Quantum Transport
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

2010

Language

English

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Research Group

ImPhys/Charged Particle Optics