Electrostatic rotator for alignment purposes in multi electron beam systems
Journal Article
(2010)
Author(s)
A.C. Zonnevylle (TU Delft - ImPhys/Charged Particle Optics)
C.T.H. Heerkens (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
ML Wieland (External organisation)
F.M. Postma (TU Delft - ImPhys/Charged Particle Optics)
SWHK Steenbrink (TU Delft - QN/Quantum Transport)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:6e2fa3ef-7c1e-4a3e-b717-75cf818ec42c
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Publication Year
2010
Language
English
Research Group
ImPhys/Charged Particle Optics
Issue number
5-8
Volume number
87
Pages (from-to)
1095-1099
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