Microfabrication and characterization of single-mask silicon microlens arrays for the IR spectra

Conference paper (2014)

Authors

PNA Belmonte External organisation
DW De Lima Monteiro External organisation
RF de Oliveira Costa External organisation
P.J. French Electronic Instrumentation - EEMCS
G. Pandraud Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation