Numerical investigation of turbomolecular pumps using the direct simulation Monte Carlo method with moving surfaces

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Numerical investigation of turbomolecular pumps using the direct simulation Monte Carlo method with moving surfaces

Journal Article (2009)

Author(s)

R. Versluis (TNO)

R. Dorsman (TU Delft - MSP/Thermal & Materials Processes, TNO)

L. Thielen (TU Delft - Old - sect Thermal and Fluids Sciences (MSP/WS), TNO)

M. E. Roos (TNO)

Research Group

BUS/TNO STAFF

DOI related publication

https://doi.org/10.1116/1.3119668 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:6f028090-3375-42d7-83be-a26c801ec9bf

More Info

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Publication Year

2009

Language

English

Research Group

BUS/TNO STAFF

Journal title

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Issue number

3

Volume number

27

Pages (from-to)

543-547

Downloads counter

8

Abstract

A new approach for performing numerical direct simulation Monte Carlo (DSMC) simulations on turbomolecular pumps in the free molecular and transitional flow regimes is described. The chosen approach is to use surfaces that move relative to the grid to model the effect of rotors and stators on a gas flow. The current article describes the method and compares the results to experimental and theoretical data by Sawada [Bull. JSME 22, 362 (1979)]. The agreement between our results and Sawada's results are excellent.