The effect of interface models on the interface stresses between a thin oxide layer and a substrate

Conference Paper (2002)
Author(s)

YT He (External organisation)

GQ Zhang (External organisation)

L.J. Ernst (TU Delft - Dynamics of Micro and Nano Systems)

Research Group
Dynamics of Micro and Nano Systems
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Publication Year
2002
Research Group
Dynamics of Micro and Nano Systems
Pages (from-to)
213-219
ISBN (print)
0-7803-9819-X

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