Effects of annealing on chemical-vapor deposited PureB layers

Journal article (2013)

Authors

C. Mok Kai Rine Electronic Components, Technology and Materials - EEMCS
AHG Vlooswijk External organisation
V. Mohammadi Electronic Components, Technology and Materials - EEMCS
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2013

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials