Phase retrieval applied to coherent Fourier scatterometry using the extended ptychographic iterative engine
P. Dwivedi (TU Delft - ImPhys/Optics)
T. Sakamoto (External organisation)
SF Pereira (TU Delft - ImPhys/Optics)
More Info
expand_more
Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.
Abstract
We have demonstrated that the extended ptychographic iterative engine (ePIE) algorithm can be applied to retrieve the phase information of the vectorial scattered field of a subwavelength object with the amplitude of the scattered field as input. We applied this technique combined with coherent Fourier scatterometry to determine the phase of the scattered field of a subwavelength grating, illuminated by a focused laser beam.