Fabrication and numerical analysis of nanoscale silicon pillars for IC applications
Conference Paper
(2005)
Author(s)
Y Civale (TU Delft - Electronic Components, Technology and Materials)
P Hadley (TU Delft - QN/Mol. Electronics & Devices)
L. K. Nanver (TU Delft - Electronic Components, Technology and Materials)
EJG Goudena (TU Delft - Old - EWI Sect. ECTM)
JHCM Slabbekoorn (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:7142e472-437e-42e7-ab44-f0a6dffa284f
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Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
79-82
ISBN (print)
90-73461-50-2
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