Resolution limit for Electron-Beam induced Deposition on thick substrates
Journal Article
(2006)
Author(s)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
N Silvis-Cividjian (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:71b4d22c-098b-46eb-b452-5d9fdb13b8c2
More Info
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Publication Year
2006
Research Group
ImPhys/Charged Particle Optics
Issue number
4
Volume number
28
Pages (from-to)
204-211
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