Resolution limit for Electron-Beam induced Deposition on thick substrates

Journal article (2006)

Authors

C.W. Hagen ImPhys/Charged Particle Optics
N Silvis-Cividjian ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

2006

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics