Unifying Ga-As and Si epitaxial growth in a standard Si/SiGe CVD system
Conference Paper
(2010)
Author(s)
A. Sammak (TU Delft - Electronic Components, Technology and Materials)
Wiebe de Boer (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:759fe155-17df-482d-b138-ff9ac022c70a
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
147-154
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