Hot-wire CVD poly-silicon films for thin film devices.
Conference Paper
(1999)
Author(s)
JK Rath (External organisation)
F. Tichelaar (TU Delft - OLD Virtual Materials and Mechanics)
H Meiling (External organisation)
REI Schropp (External organisation)
Research Group
OLD Virtual Materials and Mechanics
To reference this document use:
https://resolver.tudelft.nl/uuid:76561348-d4e3-4c8d-8b64-2e840f7a18d3
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Publication Year
1999
Research Group
OLD Virtual Materials and Mechanics
Pages (from-to)
879-890
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