A PMUT based photoacoustic system as a microfluidic concentration detector
Kaustav Roy (Indian Institute of Science)
Vijayendra Shastri (TU Delft - Mechanical Engineering)
Akshay Kumar (Indian Institute of Science)
Jagi Rout (Indian Institute of Science)
Isha Isha (Indian Institute of Science)
Kritank Kalyan (University of Pennsylvania)
Jaya Prakash (Indian Institute of Science)
Rudra Pratap (Indian Institute of Science)
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Abstract
We report on the development of a novel piezo-MEMS-based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (31) and its wide fractional bandwidth (73%).