Numerical modeling of the electromechanical interaction in mems
Book Chapter
(2010)
Author(s)
SDA Hannot (TU Delft - Dynamics of Micro and Nano Systems)
D.J. Rixen (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Dynamics of Micro and Nano Systems
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https://resolver.tudelft.nl/uuid:7754df8e-457b-42cc-98ef-18161f808d55
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Publication Year
2010
Language
English
Research Group
Dynamics of Micro and Nano Systems
Bibliographical Note
NEO@en
Pages (from-to)
315-342
ISBN (print)
9783642033445
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