Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy

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Development of sub-micron broadband lens-coupled LEKIDs for sub-mm astronomy

Journal Article (2016)

Author(s)

Alicia Gomez (Centro de Astrobiología - CSIC)

P. Prieto (Centro de Astrobiología - CSIC)

J. Bueno (SRON–Netherlands Institute for Space Research)

S. Doyle (Cardiff University)

P Barry (Cardiff University)

A. Bideaud (Cardiff University)

N. Llombart Juan (TU Delft - Tera-Hertz Sensing)

D. Granados (Instituto Madrilenõ de Estudios Avanzados en Nanociencia (IMDEA-Nanociencia))

J. L. Costa-Kramer (Instituto de Microelectronica de Madrid (CSIC))

J. Martin-Pintado (Centro de Astrobiología - CSIC)

J. J. A. Baselmans (SRON–Netherlands Institute for Space Research)

Nanofabrication Kinetic inductance detector Lumped element

DOI related publication

https://doi.org/10.1007/s10909-016-1517-9 Final published version

To reference this document use

https://resolver.tudelft.nl/uuid:7c82cff3-9af4-48b9-bc09-7a2d97cbf67d

More Info

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Publication Year

2016

Language

English

Issue number

1

Volume number

184

Pages (from-to)

148-153

Downloads counter

257

Abstract

We present a fabrication method for sub-micron lens-coupled lumped element kinetic inductance detectors (LEKIDs) for broadband sub-millimeter (sub-mm) and THz radiation detection. The LEKIDs are fabricated from very thin (12 nm) and narrow (200 nm) aluminum lines to match the impedance of the LEKID to the substrate impedance. The fabrication process is based on a combination of maskless laserwriter lithography and electron beam lithography, providing low (few microns) and high resolution (down to 200 nm) over large areas in a single process. Preliminary optical characterization shows that the fabricated LEKIDs are sensitive to 1.5 THz radiation.