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Journal article (2004)

Authors

B Karpuschewski Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
E Visser External organisation
AR Daalhuisen External organisation
H Geven External organisation
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering