Micro-fabricated channel with ultra-thin yet ultra-strong windows enables electron microscopy under 4-bar pressure
T Alan (TU Delft - Electronic Components, Technology and Materials)
T. Yokosawa (QN/High Resolution Electron Microscopy)
J Gaspar (External organisation)
G. Pandraud (TU Delft - Electronic Components, Technology and Materials)
O Paul (External organisation)
JF Creemer (TU Delft - Electronic Components, Technology and Materials)
P.M. Sarro (TU Delft - Electronic Components, Technology and Materials)
Henny W. Zandbergen (QN/High Resolution Electron Microscopy)
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Abstract
Transmission electron microscopy (TEM) of (de-)hydrogenation reactions is crucial to characterize efficiency of hydrogen storage materials. The nanoreactor, a micromachined channel with 15-nm-thick windows, effectively confines the gas flow to an electron-transparent chamber during TEM of reactions. Realistic experiments require very high pressures to be sustained by the device. Nanomechanical bulge tests and simulations show that due to a very strong size effect, ultra-thin device components can reliably withstand tensile stresses as high as 19.5¿GPa enabling high pressure operation. We use the device to characterize Pd particles under a 4-bar H2 pressure within the ultra-high-vacuum of the TEM
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