On the Definition of Reference Planes in Probe-level Calibrations

Conference paper (2016)

Authors

L. Galatro Electronics -

F.A. Mubarak VSL Dutch Metrology Institute, Electronics -

M. Spirito Electronics -

Research Group

Electronics () (TU Delft)

Calibration On-wafer Wafer probes EM simulation VNA RSOL

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http://resolver.tudelft.nl/uuid:81088b48-cf05-4582-830e-255b51f5ba07

Published Date

2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics

Abstract

In this contribution we analyze the definition of reference planes in probe-level calibrations. The removal of the probe type from the calibration definition is presented first analyzing the transition discontinuities and defining to which extent they have to be incorporated in the calibration error terms. Subsequently a commercial calibration, which is defined specific to a probe topology, is considered and its frequency dependent standard response are computed accurately via a 3D EM simulator. These probe independent standard definitions are then used to compare the accuracy achieved on the same structures, (i.e., CPW lines of different lengths) from two different probe topologies. Finally, the data from both probes are compared, using a worst bound metric, to the data achieved when using the probe specific calibration data showing an accuracy improvement for the probe independent approach, validating the improved identification of the reference plane proposed here.