Modeling and Understanding the Compact Performance of h-BN Dual-Gated ReS2 Transistor

Journal Article (2021)
Author(s)

Kookjin Lee (Katholieke Universiteit Leuven, IMEC)

Junhee Choi (Korea University)

Ben Kaczer (IMEC-Solliance, Ewha Womans University)

Alexander Grill (IMEC-Solliance)

Jae Woo Lee (Korea University)

Simon Van Beek (IMEC-Solliance)

Jaewoo Lee (Korea University)

Dong Hoon Shin (Kavli institute of nanoscience Delft, TU Delft - QN/Steeneken Lab)

Sang Wook Lee (Ewha Womans University)

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DOI related publication
https://doi.org/10.1002/adfm.202100625 Final published version
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Publication Year
2021
Language
English
Issue number
23
Volume number
31
Article number
2100625
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Abstract

In this study, high-performance few-layered ReS2 field-effect transistors (FETs), fabricated with hexagonal boron nitride (h-BN) as top/bottom dual gate dielectrics, are presented. The performance of h-BN dual gated ReS2 FET having a trade-off of performance parameters is optimized using a compact model from analytical choice maps, which consists of three regions with different electrical characteristics. The bottom h-BN dielectric has almost no defects and provides a physical distance between the traps in the SiO2 and the carriers in the ReS2 channel. Using a compact analyzing model and structural advantages, an excellent and optimized performance is introduced consisting of h-BN dual-gated ReS2 with a high mobility of 46.1 cm2 V−1 s−1, a high current on/off ratio of ≈106, a subthreshold swing of 2.7 V dec−1, and a low effective interface trap density (Nt,eff) of 7.85 × 1010 cm−2 eV−1 at a small operating voltage (<3 V). These phenomena are demonstrated through not only a fundamental current–voltage analysis, but also technology computer aided design simulations, time-dependent current, and low-frequency noise analysis. In addition, a simple method is introduced to extract the interlayer resistance of ReS2 channel through Y-function method as a function of constant top gate bias.

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